====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+04 A   Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
  Layer # 1-  W = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   101.4E+02 A   Straggling =   290.0E+01 A
 Ion Lateral Range =   289.7E+01 A   Straggling =   356.3E+01 A
 Ion Radial  Range =   458.3E+01 A   Straggling =   217.8E+01 A
====================================================================
 Transmitted Ions =;  Backscattered Ions =7
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.7134  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 003.3615  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe          W    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
200010.E-03  0.0000E+00  2.5085E+07
400010.E-03  0.0000E+00  3.2002E+07
600010.E-03  1.4985E+03  3.1209E+07
800010.E-03  0.0000E+00  2.6194E+07
100001.E-02  0.0000E+00  3.0558E+07
120001.E-02  0.0000E+00  3.7856E+07
140001.E-02  9.9900E+02  3.4548E+07
160001.E-02  9.9900E+02  3.0117E+07
180001.E-02  4.9950E+02  3.3380E+07
200001.E-02  9.9900E+02  4.2999E+07
220001.E-02  4.9950E+02  4.0925E+07
240001.E-02  2.4975E+03  4.0865E+07
260001.E-02  9.9900E+02  4.6710E+07
280001.E-02  2.4975E+03  4.4425E+07
300001.E-02  1.4985E+03  4.9405E+07
320001.E-02  9.9900E+02  5.1229E+07
340001.E-02  1.9980E+03  4.9552E+07
360001.E-02  9.9900E+02  5.3103E+07
380001.E-02  3.4965E+03  6.0910E+07
400001.E-02  1.9980E+03  6.1017E+07
420001.E-02  1.4985E+03  5.9770E+07
440001.E-02  9.9900E+02  5.3205E+07
460001.E-02  2.9970E+03  5.8249E+07
480001.E-02  2.4975E+03  5.4683E+07
500001.E-02  3.4965E+03  6.4813E+07
520001.E-02  2.4975E+03  6.0299E+07
540001.E-02  1.9980E+03  5.8290E+07
560001.E-02  1.9980E+03  7.1235E+07
580001.E-02  2.4975E+03  7.4868E+07
600001.E-02  2.9970E+03  7.5284E+07
620001.E-02  3.9960E+03  7.3611E+07
640001.E-02  5.4945E+03  6.8632E+07
660001.E-02  4.4955E+03  7.9042E+07
680001.E-02  6.9930E+03  6.7087E+07
700001.E-02  3.9960E+03  6.1780E+07
720001.E-02  3.9960E+03  7.1424E+07
740001.E-02  6.4935E+03  7.2965E+07
760001.E-02  7.4925E+03  7.9015E+07
780001.E-02  7.4925E+03  8.6452E+07
800001.E-02  4.9950E+03  8.0942E+07
820001.E-02  5.9940E+03  8.5331E+07
840001.E-02  7.4925E+03  8.7266E+07
860001.E-02  9.9900E+03  8.9325E+07
880001.E-02  9.4905E+03  9.5771E+07
900001.E-02  1.2987E+04  9.0477E+07
920001.E-02  1.0989E+04  8.9699E+07
940001.E-02  1.7483E+04  9.3162E+07
960001.E-02  9.4905E+03  8.6831E+07
980001.E-02  1.1988E+04  9.9918E+07
100000.E-01  1.1988E+04  9.9731E+07
102000.E-01  1.2488E+04  9.3556E+07
104000.E-01  1.1489E+04  8.6984E+07
106000.E-01  1.6484E+04  9.3623E+07
108000.E-01  1.8482E+04  9.7595E+07
110000.E-01  1.4985E+04  7.8253E+07
112000.E-01  1.2987E+04  7.5124E+07
114000.E-01  1.6983E+04  7.6030E+07
116000.E-01  1.5984E+04  6.0449E+07
118000.E-01  1.1489E+04  6.3803E+07
120000.E-01  1.2488E+04  5.4268E+07
122000.E-01  1.9481E+04  5.5025E+07
124000.E-01  1.6484E+04  4.8290E+07
126000.E-01  9.4905E+03  4.8158E+07
128000.E-01  1.3986E+04  4.5885E+07
130000.E-01  1.3986E+04  3.9558E+07
132000.E-01  7.9920E+03  3.0017E+07
134000.E-01  1.2488E+04  2.5590E+07
136000.E-01  7.4925E+03  2.3822E+07
138000.E-01  6.4935E+03  1.6084E+07
140000.E-01  6.9930E+03  1.5764E+07
142000.E-01  5.9940E+03  1.2502E+07
144000.E-01  4.4955E+03  8.5188E+06
146000.E-01  1.9980E+03  4.1278E+06
148000.E-01  5.4945E+03  6.0973E+06
150000.E-01  1.9980E+03  4.3167E+06
152000.E-01  1.9980E+03  3.8630E+06
154000.E-01  1.9980E+03  2.7401E+06
156000.E-01  1.9980E+03  2.6202E+06
158000.E-01  1.4985E+03  1.9890E+06
160000.E-01  4.9950E+02  1.8881E+05
162000.E-01  0.0000E+00  2.1479E+04
164000.E-01  0.0000E+00  2.3177E+05
166000.E-01  4.9950E+02  6.9631E+05
168000.E-01  0.0000E+00  6.0440E+04
170000.E-01  0.0000E+00  6.5934E+04
172000.E-01  0.0000E+00  3.6464E+04
174000.E-01  0.0000E+00  1.9131E+05
176000.E-01  4.9950E+02  4.0160E+05
178000.E-01  0.0000E+00  0.0000E+00
180000.E-01  0.0000E+00  0.0000E+00
182000.E-01  0.0000E+00  0.0000E+00
184000.E-01  0.0000E+00  0.0000E+00
186000.E-01  0.0000E+00  0.0000E+00
188000.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192000.E-01  0.0000E+00  0.0000E+00
194000.E-01  0.0000E+00  0.0000E+00
196000.E-01  0.0000E+00  0.0000E+00
198000.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
